Mikrofluidische Vorrichtung mit Elektroden
Anmelder: Imec VZW 🇧🇪
Details
- Veröffentlichungs-Nr.
- EP4814101
- Anmeldetag
- 28. März 2025
- Veröffentlichung
- 30. September 2026
- Rechtsraum
- EP
- IPC
- C12M3/06, B01L3/00, C12M1/42
Abstract
A method for forming a microfluidic device includes: providing a substrate with electrodes having distal ends buried in the substrate; forming interconnect and dielectric layers; exposing the substrate surface by forming a hole through layers; filling the hole with sacrificial material; forming a composite layer with a first structure as a placeholder for a microfluidic compartment and a second structure enclosing the first structure; selectively etching the substrate to expose electrodes and filled hole surface; and removing sacrificial material, thereby forming a through-hole and a microfluidic compartment fluidically connected. The electrodes form a ring around the hole with the hole positioned within the ring boundary, enabling culturing of three-dimensional biological cell structures.
Anmelder
- Firma
- Imec VZW
- Land
- 🇧🇪 Belgien
Imec ist ein belgisches Forschungszentrum mit Sitz in Leuven, das auf Nanoelektronik, Halbleitertechnologie und digitale Technologien spezialisiert ist.
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