Vorrichtung zur Grossflächigen Kollimierten Beschichtung mit Doppelneigung und Trägermodul

Details

Veröffentlichungs-Nr.

EP4814157

Anmeldetag

25. März 2025

Veröffentlichung

30. September 2026

Rechtsraum

EP

Abstract

A dual-tilt large-area collimated coating device (Z) and a carrier module (D). The dual-tilt large-area collimated coating device (Z) includes a base module (1), a rotating module (2) and a carrier module (D). The rotating module (2) is movably arranged on the base module (1). The carrier module (D) includes a module body (D1), a carrier assembly (D2), a first driving assembly (D3) and a second driving assembly (D4). The module body (D1) is connected to the rotating module (2), and has an accommodating space (D10), a first opening (D11), and a plurality of shielding elements (D12). The accommodating space (D10) is communicated with the first opening (D11). The shielding elements (D12) are configured to open or shield the first opening (D11). The carrier assembly (D2) is configured to hold an object (B). The first driving assembly (D3) is configured to drive the carrier assembly (D2) to perform a reciprocating displacement in a predetermined direction. The second driving assembly (D4) is configured to drive the carrier assembly (D2) to rotate around a first axis (AC2).

Anmelder

Firma

AdNaNotek Corp.

Land

🇹🇼 Taiwan