Messvorrichtung und -Verfahren
Anmelder: Universiteit van Amsterdam, Stichting Nederlandse Wetenschappelijk Onderzoek Instituten, Stichting VU, ASML Netherlands B.V. 🇳🇱
Details
- Veröffentlichungs-Nr.
- EP4815025
- Anmeldetag
- 26. März 2025
- Veröffentlichung
- 30. September 2026
- Rechtsraum
- EP
Abstract
The present invention relates to a device for determining charge associated with an electric field in a sample subject to a charged-particle beam, the device comprising: an excitation light source configured to emit excitation light toward the sample, the excitation light having an excitation wavelength; a detector configured to detect emission light generated by the sample in response to the excitation light, the emission light having an emission wavelength that is less than the excitation wavelength; and a module configured to determine charge on the sample based on the detected emission light, the charge being associated with the charged-particle beam on the sample.
Anmelder
- Firmen
- Universiteit van Amsterdam
Stichting Nederlandse Wetenschappelijk Onderzoek Instituten
Stichting VU
ASML Netherlands B.V. - Land
- 🇳🇱 Niederlande
Niederländisches Unternehmen, das Lithografiesysteme und weitere Anlagen für die Halbleiterfertigung entwickelt und herstellt, zentral für die Chipindustrie.
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