Verfahren zur Ermittlung eines Optimalen Bildkontrastes bei Verwendung einer Laserphasenplatte

Details

Veröffentlichungs-Nr.

EP4815026

Anmeldetag

17. Februar 2026

Veröffentlichung

30. September 2026

Rechtsraum

EP

IPC

H01J37/22, H01J37/26

Abstract

Phase contrast imaging in charged particle beam (CPB) systems is controlled by adjusting an undeviated component of a CPB to be at a predetermined location in a diffraction plane in which a phase plate such as a laser phase plate is situated. By scanning the undeviated CPB component in the diffraction plane and assessing image contrast or image spectra, alignment corresponding to the phase at the predetermined phase location can be confirmed and/or offsets corrected.

Anmelder

Firma

FEI Company

Land

🇺🇸 USA

Fachgebiete