Probengasversorgungsvorrichtung
Anmelder: Jeol Ltd. 🇯🇵
Details
- Veröffentlichungs-Nr.
- EP4822358
- Anmeldetag
- 2. April 2026
- Veröffentlichung
- 14. Oktober 2026
- Rechtsraum
- EP
- IPC
- G01N35/10, H01J49/04
Abstract
The device (12) has a central structural body (20) consisting of a flow regulating valve (22) and a nozzle (24) which are integrated together. Open-close valves (28, 38, 48) are mounted around the central structural body (20). The valves (28, 38, 48) have their respective central axes (C3, not shown, C4) parallel to the central axes (C1, C2) of the central structural body (20). The flow regulating valve (22) has a housing (66) and a movable body (54). The housing (66) has three branch ports (A1-A3) and an orifice. The movable body (54) has a needle (60). The flow rate of the sample gas is regulated by adjustment of the amount of insertion of the needle (60) into the orifice.
Anmelder
- Firma
- Jeol Ltd.
- Land
- 🇯🇵 Japan
Japanisches Unternehmen mit Sitz in Tokio, das wissenschaftliche und industrielle Präzisionsgeräte entwickelt, darunter Elektronenmikroskope, Analysegeräte und Halbleiterfertigungsanlagen.
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