Optische Komponente und Verfahren zur Entfernung von auf einer Optischen Komponente Abgeschiedenem Erdalkalimetall

Details

Veröffentlichungs-Nr.

EP4826418

Anmeldetag

16. April 2026

Veröffentlichung

21. Oktober 2026

Rechtsraum

EP

IPC

G02B1/18, G02B27/00

Abstract

Provided is an optical component used in an environment in which at least a part of the optical component is in contact with an alkaline earth metal vapor, the optical component including at least a dielectric multilayer coating and an aluminum oxide layer on an optical path, in which an outermost surface on a side in contact with the alkaline earth metal vapor is coated with the aluminum oxide layer. Further provided is a method of removing an alkaline earth metal deposited on an optical component, the method including heating, after the optical component is used in an environment in which at least a part of the optical component is in contact with an alkaline earth metal vapor, the optical component at a heating temperature of 200°C or higher to cause the alkaline earth metal deposited on the optical component to sublime.

Anmelder

Firmen

RIKEN
Jeol Ltd.

Land

🇯🇵 Japan

Fachgebiete