Film mit Lichtempfindlicher Harzzusammensetzung, Gehärtetes Produkt, Szintillatortafel damit und Halbleiterbauelement

Details

Veröffentlichungs-Nr.

EP4826449

Anmeldetag

5. Dezember 2024

Veröffentlichung

19. Juni 2025

Rechtsraum

EP

Abstract

Provided is a photosensitive resin composition film comprising (A) a resin, (B) an epoxy compound and/or an oxetane compound, and (C) a photocationic polymerization initiator, wherein: a transmittance Tα (%) per unit film thickness at a wavelength of 405 nm of one surface and a transmittance Tβ (%) per unit film thickness at a wavelength of 405 nm of the other surface satisfy the following formula (1): Tα > Tβ <img class="EMIRef" id="2b5b1af5-2c79-408e-af6c-1900b23effa0-ia01" /> and a content C10 (% by mass) of the (C) photocationic polymerization initiator at a depth of 10%, relative to the thickness of the photosensitive resin composition film, from the surface on the side where the transmittance per unit film thickness at a wavelength of 405 nm is Tα (%), and a content C90 (% by mass) of the (C) photocationic polymerization initiator at a depth of 90% from the surface satisfy the following formula (2): 0.050 ≤ C 10 / C 90 ≤ 0.85 The photosensitive resin composition film can form a pattern with a high aspect ratio.

Anmelder

Firma

Toray Industries, Inc.

Land

🇯🇵 Japan