Drucksensor mit mehreren Wheatstone-Brückekonfigurationen

Details

Veröffentlichungs-Nr.

EP3336503

Aktenzeichen

EP17198581

Anmeldetag

26. Oktober 2017

Veröffentlichung

16. Dezember 2020

Erteilung

16. Dezember 2020

Rechtsraum

EP

IPC

G01L9/00G01L9/04

Abstract

A pressure sensor includes a diaphragm suspended across a cavity in a substrate. A first group of piezoresistors is provided in the diaphragm proximate a first outer edge of the diaphragm, the piezoresistors of the first group being coupled to one another to form a first Wheatstone bridge. A second group of piezoresistors is provided in the diaphragm proximate a second outer edge of the diaphragm, the piezoresistors of the second group being coupled to one another to form a second Wheatstone bridge. The first and second Wheatstone bridges exhibit mirror symmetry relative to one another. Output signals from each of the first and second Wheatstone bridges are processed at respective first and second differential amplifiers. The output signals from each of the first and second differential amplifiers are processed at a third differential amplifier to produce a pressure output signal with enhanced sensitivity and reduced impact from process variation.

Anmelder

Firma

NXP USA, Inc.

Land

🇺🇸 USA

Fachgebiete