Winkelgeschwindigkeitssensor mit Struktur zur Unterdrückung von Gleichphasiger Bewegung

Details

Veröffentlichungs-Nr.

EP3428576

Aktenzeichen

EP18165588

Anmeldetag

4. April 2018

Veröffentlichung

24. Februar 2021

Erteilung

24. Februar 2021

Rechtsraum

EP

IPC

G01C19/5733G01C19/5747G01C19/5769G01C19/5621

Abstract

An angular rate sensor includes four Coriolis masses, configured such that the Coriolis masses move along perpendicular drive and sense axes, and a lever mechanism having first and second sets of levers. The first set of levers is coupled outside a boundary of the Coriolis masses, and the second set of levers is coupled within a boundary of the first set of levers and between the Coriolis masses. The second set of levers is configured to produce an anti-phase drive mode motion of the Coriolis masses along the drive axis. The first set of levers is configured to allow an anti-phase sense mode motion of the Coriolis masses along the sense axis responsive to the angular rate sensor rotating around an input axis that is perpendicular to the drive and sense axes. The first and second sets of levers are configured to constrain an in-phase motion of the Coriolis masses.

Anmelder

Firma

NXP USA, Inc.

Land

🇺🇸 USA

Fachgebiete