Verfahren und Vorrichtung zur Erzeugung Kurzwelliger Strahlung

Details

Veröffentlichungs-Nr.

EP4087373

Aktenzeichen

EP21171798

Anmeldetag

3. Mai 2021

Veröffentlichung

7. Januar 2026

Erteilung

7. Januar 2026

Rechtsraum

EP

IPC

H05G2/00H01S3/00

Abstract

This invention discloses a method and device for generating short-wavelength radiation (8), in particular extreme ultraviolet (EUV) and X-ray light. The burst (4) of light pulses is generated by a near-matched length regenerative amplifier (2) and master oscillator (1) pair. A sequence of light pulses (burst) (4) with a picosecond to the nanosecond time separation between the pulses and/or microsecond time separation between the burst packets (4) are generated out of the regenerative amplifier (2) cavity. The generated pulse sequence (4) acts as a pre-pulse and main pulse pair which is delivered to the target (7). The high-intensity laser radiation beam (3) interaction with generated plasma leads to the generated short-wavelength output (8) measured (9) as a photon flux.

Anmelder

Firma

UAB Light Conversion

Land

🇱🇹 Litauen

Fachgebiete