Integrierte Optische Struktur und Verfahren zur Herstellung einer Integrierten Optischen Struktur

Details

Veröffentlichungs-Nr.

EP4822430

Anmeldetag

11. April 2025

Veröffentlichung

14. Oktober 2026

Rechtsraum

EP

IPC

G02F1/01, G02F1/225

Abstract

The disclosure relates to an integrated optical structure (10). The integrated optical structure (10) comprises an optical waveguide structure (11); a beam structure (12) which is suspended at a first distance to the optical waveguide structure (11), wherein the beam structure (12) comprises a first section (12A) of a first material and a second section (12B) of a second material, wherein the first material is a conductive material and the second material is a non-conductive material or a semiconductor; an electrode structure (21) arranged at a second distance to the beam structure (12); and an electrical contact structure configured to apply a voltage between the electrode structure (21) and the first section (12A) of the beam structure (12) inducing an electrostatic force acting between the electrode structure (21) and the first section (12A); wherein the beam structure (12) is designed to be elastically bent towards or away from the optical waveguide structure (11) by the electrostatic force causing a change in an optical property, in particular a phase, of an optical signal propagating through the optical waveguide structure (11).

Anmelder

Firma

Imec VZW

Land

🇧🇪 Belgien

Fachgebiete