Watermeyer, Nicholas

A target carrier assembly includes a housing, a target, and a collimator. The housing includes a collimator compartment and a target compartment divided by a vacuum window foil, the collimator being removably disposed within the collimator compartment, and the target being disposed within the target compartment. The collimator compartment is attached to a cyclotron beam line in the irradiation position, and the target compartment is in fluid communication with a cooling fluid supply line and a cooling fluid return line in the irradiation position. The target is cooled by the cooling fluid from the cooling fluid supply line. The collimator directs a particle beam from the cyclotron beam line to irradiate the target and includes a beam entry diameter and a beam exit diameter. The collimator is in thermal contact with the collimator compartment.

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Zusammenfassung wird geladen …

Zusammenfassung wird geladen …

Zusammenfassung wird geladen …

Zusammenfassung wird geladen …

Zusammenfassung wird geladen …

Provided is a method for producing a quaternary ammonium compound aqueous solution, said method being characterized in that: the quaternary ammonium compound aqueous solution contains not more than 1,000 ppm of organic impurities that have a molecular weight of not less than 1,000 g/mole; and a raw quaternary ammonium compound aqueous solution that contains specific quaternary ammonium ions and that contains metal impurities is brought into contact with a cation exchange resin which has a crosslinking degree of not less than 6 and counter ions of which are non-metal ions.

Provided is a photoresist developing solution comprising (A), (B), (C), and (D). (A) is a quaternary ammonium ion represented by formula (1), (B) is a halide ion, (C) is a hydroxide ion, and (D) is water. (In the formula, R1, R}2, R3, and R4 are each independently a C1-16 alkyl group; at least one of R¹, R2, R3, and R4 is a C2-16 alkyl group; and not all of R¹, R2, R3, and R4 are the same alkyl group.)

Provided is an aqueous alkali solution containing (A) through (E). (A) is a quaternary ammonium ion represented by formula (1), (B) is a halide ion, (C) is a hydroxide ion, (D) is water, and (E) is a corrosion inhibitor. (In the formula, R¹, R², R³, and R⁴ are each independently a C1-16 alkyl group, and at least one of R¹, R², R³ and R⁴ is a C2-16 alkyl group.)