Sensirion

A semiconductor ring laser (1) comprising a ring waveguide formed of a ridge (12) of semiconductor material having inner and outer sidewalls (14, 16) and a top surface (18). A mode selecting grating is arranged on at least one of the inner and outer sidewalls (14, 16) to define a ring cavity that supports a radiative and a non-radiative mode, the non-radiative mode having lower losses than the radiative mode so that the non-radiative mode becomes the lasing mode. An output coupler is arranged on at least one of the inner and outer sidewalls (14, 16) and configured such that, local to the output coupler, the non-radiative mode that is the lasing mode is forced into a radiative mode, or a mixed radiative and non-radiative mode, thereby to couple laser light out of the ring waveguide through at least one of the inner and outer sidewalls (14, 16).

A semiconductor laser chip 100 comprising a semiconductor laser 1 formed from a stack of semiconductor layers 10 including active region layers 20 and upper and lower cladding layers arranged above and below the active region layers. The semiconductor layer stack is structured by a ridge 12₁ for the semiconductor laser 1. The upper and lower cladding layers and the ridge 12₁ collectively define a waveguide in the active region layers 20 that supports an optical mode 28 for lasing. A heater element 2 and a temperature sensor 3 are monolithically integrated with the semiconductor layer stack. Monolithic integration of a heater element 2 and a temperature sensor 3 on the semiconductor laser chip 100 allows closed-loop control of the temperature of the semiconductor laser 1. The semiconductor laser 1 can thus be temperature stabilized and also have its emission wavelength tuned by varying its temperature.

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A photoacoustic gas sensor device is proposed for determining a value indicative of a presence or a concentration of a component in a gas. The photoacoustic gas sensor device comprises a substrate (1), and a measurement cell body (2) arranged on a first side (11) of the substrate (1). The substrate (1) and the measurement cell body (2) define a measurement cell enclosing a measurement volume (3). The measurement cell comprises an aperture (4) for a gas to enter the measurement volume (3). The device further comprises an electromagnetic radiation source (7) for emitting electromagnetic radiation (8), and a microphone (6) for measuring a sound wave (9) generated by the component in response to an absorption of electromagnetic radiation (8) by the component. The electromagnetic radiation source (7) and the microphone (6) are arranged on the first side (11) of the substrate (1) and in the measurement volume (3). The microphone (6) has a bottom port (61) facing the substrate (1), and the measurement volume (3) is communicatively coupled to the bottom port (61).

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A sensor device robust against vibrations is proposed. A sensor module is encapsulated with a housing and the space in between is filled with a vibration damping material such that the sensor module is only supported by the vibration damping material. A cavity in the housing formed partly by the sensor module and sealed against liquid water but permeable to a target component of ambient air allows for a fast sensor response time.

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