JEOL

The device (12) has a central structural body (20) consisting of a flow regulating valve (22) and a nozzle (24) which are integrated together. Open-close valves (28, 38, 48) are mounted around the central structural body (20). The valves (28, 38, 48) have their respective central axes (C3, not shown, C4) parallel to the central axes (C1, C2) of the central structural body (20). The flow regulating valve (22) has a housing (66) and a movable body (54). The housing (66) has three branch ports (A1-A3) and an orifice. The movable body (54) has a needle (60). The flow rate of the sample gas is regulated by adjustment of the amount of insertion of the needle (60) into the orifice.

A three-dimensional powder bed fusion additive manufacturing (PBF-AM) apparatus (10, 10B) includes a build plate (22), a powder supply device (16), an irradiation device (14), a detection unit (40, 80), and a shielding member (30, 91). The powder supply device (16) supplies a powder material (32) to the build plate (22) to form a powder layer. The irradiation device (14) irradiates the powder layer with a primary ray (15). The detection unit (40, 80) detects backscattered electrons (61) generated when the powder material (32) is irradiated with the primary ray (15). The shielding member (30, 91) openably and closably covers a detection surface of the detection unit (40, 80).

A detector (100) includes: a detecting element (10) that detects X-rays; a cooling element (50) that cools the detecting element (10); and a first shield (30) and a second shield (40) that are disposed between the detecting element (10) and the cooling element (50), wherein the first shield (30) is mainly composed of an element having an atomic number smaller than an average atomic number of materials constituting the second shield (40), a first surface of the first shield (30) and a second surface of the second shield (40) are in contact with each other, and the first surface and the second surface are not fastened to each other.

An analyzer (100) includes: a specimen stage (20) that supports a specimen (S) and is capable of changing a position of the specimen (S); an electron optical system (10) that irradiates the specimen (S) with an electron beam (EB); a spectrometer (50) that separates and detects an X-ray with a specific wavelength from X-rays emitted from the specimen (S); an imaging device (60) that captures an optical image of the specimen (S); and a control unit (70) that adjusts a position of the specimen (S) so as to satisfy a focusing condition of the spectrometer (50). The imaging device (60) includes a variable focal length lens (66) that electrically changes a focal length, and the control unit (70) causes the specimen stage (20) to move the specimen (S) to a position satisfying the focusing condition based on a value of an electric signal supplied to the variable focal length lens (66) when a focus of the imaging device (60) has been adjusted to the specimen (S).

There is provided a method of analysis capable of correcting X-ray spectra precisely. The method of analysis uses an analysis apparatus (100) equipped with a plurality of wavelength-dispersive X-ray spectroscopy (WDS) spectrometers (50a-50e). The method starts with producing an X-ray spectrum by spectrally dispersing X-rays by the first spectrometer (50a). The X-rays are spectrally dispersed by the second spectrometer (50b) and X-rays from a corrective element are detected out of the dispersed X-rays to obtain information about timewise variations of the intensity of the X-rays from the corrective element. The intensity of X-rays from an element under analysis within the X-ray spectrum is corrected based on the information about the timewise variations of the intensity of the X-rays from the corrective element. In the step of correcting the intensity of the X-rays from the element under analysis, information about the intensity of the X-rays from the corrective element detected at the same timing as the X-rays from the element under analysis is obtained from the information about the timewise variations of the intensity of the X-rays from the corrective element. The intensity of the X-rays from the element under analysis is corrected based on the information about the intensity of the X-rays from the corrective element detected at the same timing as the X-rays from the element under analysis.

In an automated analyzer (100), a dispensing mechanism (8) includes: a probe (80); a drive mechanism (84) that moves the probe (80) in a horizontal direction; a first sensor (86) that detects a contact of the probe (80) with a liquid surface; and a second sensor (88) that detects a collision of the probe (80), the probe (80) dispenses or sucks liquid to or from a container (26) disposed at a first position (P) when the probe (80) has stopped at a second position (J), and the control unit (40) performs: processing of disposing a target container (26) containing a liquid for detection at the first position (P); processing of performing a first scan of repeating processing of moving the probe (8) in a horizontal direction to change a stop position of the probe (8) and processing of acquiring a detection result of the first sensor (86) and a detection result of the second sensor (88) at the changed stop position; and processing of correcting the second position (J) based on a result of the first scan.

A battery sample is contained in a cell body (64). A first pin (74) having two O rings (110, 112) is inserted into a first pin hole (106) formed on the cell body (64). A second pin (78) having two O rings (122, 124) is inserted into a second pin hole (118) formed on the cell body (64). The battery sample and the two pins (74, 78) are electrically connected to each other by two connection members (116, 128).

A method of generating reports starts with comparing an event log (38) with a plurality of event patterns (74). It is found that there is a match between a certain series of events (80) and a certain event pattern (74). A data set (84) acquired by execution of the certain series of events (80) is incorporated into a template (76A) corresponding to the certain event pattern (74). Consequently, a candidate report (86) is generated. The automatically generated candidate report (86) is deleted as needed according to a user's instruction.

An electron microscope (100) includes: an electron source (10) that emits an electron beam; an electrostatic/electromagnetic field superposed objective lens (20) in which an acceleration tube (240) is built into a magnetic field lens; a correction electrode (50) placed between the acceleration tube (240) and a specimen (S); and a specimen stage (30) that tiltably supports the specimen (S), wherein a positive voltage is applied to the acceleration tube (240), a negative voltage is applied to the correction electrode (50), and a potential on an optical axis (A) between the correction electrode (50) and the specimen (S) is equal to or higher than a potential of the specimen (S).

An information processing apparatus (54) includes: a defect candidate specifying unit (72) that specifies a plurality of defect candidates that are located at substantially same positions in a plurality of layers that are adjacent in a stacking direction; a defect detection unit (73) that detects defects remaining in shaped objects on the basis of sizes of the plurality of defect candidates, which are located at substantially the same positions and are specified in the plurality of layers, in the stacking direction and sizes inside the layers; and a shaping control unit (71) that performs control to stop at least PBF-AM of shaped objects, from which the defects have been detected, or output a warning in a case where the sizes of the defects exceed a preset threshold value in the middle of the PBF-AM.