JEOL Patente

There is provided a method of analysis capable of correcting X-ray spectra precisely. The method of analysis uses an analysis apparatus (100) equipped with a plurality of wavelength-dispersive X-ray spectroscopy (WDS) spectrometers (50a-50e). The method starts with producing an X-ray spectrum by spectrally dispersing X-rays by the first spectrometer (50a). The X-rays are spectrally dispersed by the second spectrometer (50b) and X-rays from a corrective element are detected out of the dispersed X-rays to obtain information about timewise variations of the intensity of the X-rays from the corrective element. The intensity of X-rays from an element under analysis within the X-ray spectrum is corrected based on the information about the timewise variations of the intensity of the X-rays from the corrective element. In the step of correcting the intensity of the X-rays from the element under analysis, information about the intensity of the X-rays from the corrective element detected at the same timing as the X-rays from the element under analysis is obtained from the information about the timewise variations of the intensity of the X-rays from the corrective element. The intensity of the X-rays from the element under analysis is corrected based on the information about the intensity of the X-rays from the corrective element detected at the same timing as the X-rays from the element under analysis.

An analyzer (100) includes: a specimen stage (20) that supports a specimen (S) and is capable of changing a position of the specimen (S); an electron optical system (10) that irradiates the specimen (S) with an electron beam (EB); a spectrometer (50) that separates and detects an X-ray with a specific wavelength from X-rays emitted from the specimen (S); an imaging device (60) that captures an optical image of the specimen (S); and a control unit (70) that adjusts a position of the specimen (S) so as to satisfy a focusing condition of the spectrometer (50). The imaging device (60) includes a variable focal length lens (66) that electrically changes a focal length, and the control unit (70) causes the specimen stage (20) to move the specimen (S) to a position satisfying the focusing condition based on a value of an electric signal supplied to the variable focal length lens (66) when a focus of the imaging device (60) has been adjusted to the specimen (S).

In an automated analyzer (100), a dispensing mechanism (8) includes: a probe (80); a drive mechanism (84) that moves the probe (80) in a horizontal direction; a first sensor (86) that detects a contact of the probe (80) with a liquid surface; and a second sensor (88) that detects a collision of the probe (80), the probe (80) dispenses or sucks liquid to or from a container (26) disposed at a first position (P) when the probe (80) has stopped at a second position (J), and the control unit (40) performs: processing of disposing a target container (26) containing a liquid for detection at the first position (P); processing of performing a first scan of repeating processing of moving the probe (8) in a horizontal direction to change a stop position of the probe (8) and processing of acquiring a detection result of the first sensor (86) and a detection result of the second sensor (88) at the changed stop position; and processing of correcting the second position (J) based on a result of the first scan.

A battery sample is contained in a cell body (64). A first pin (74) having two O rings (110, 112) is inserted into a first pin hole (106) formed on the cell body (64). A second pin (78) having two O rings (122, 124) is inserted into a second pin hole (118) formed on the cell body (64). The battery sample and the two pins (74, 78) are electrically connected to each other by two connection members (116, 128).

A method of generating reports starts with comparing an event log (38) with a plurality of event patterns (74). It is found that there is a match between a certain series of events (80) and a certain event pattern (74). A data set (84) acquired by execution of the certain series of events (80) is incorporated into a template (76A) corresponding to the certain event pattern (74). Consequently, a candidate report (86) is generated. The automatically generated candidate report (86) is deleted as needed according to a user's instruction.

An electron microscope (100) includes: an electron source (10) that emits an electron beam; an electrostatic/electromagnetic field superposed objective lens (20) in which an acceleration tube (240) is built into a magnetic field lens; a correction electrode (50) placed between the acceleration tube (240) and a specimen (S); and a specimen stage (30) that tiltably supports the specimen (S), wherein a positive voltage is applied to the acceleration tube (240), a negative voltage is applied to the correction electrode (50), and a potential on an optical axis (A) between the correction electrode (50) and the specimen (S) is equal to or higher than a potential of the specimen (S).

An information processing apparatus includes: a defect candidate specifying unit (72) configured to specify a plurality of defect candidates positioned at substantially the same positions in a plurality of layers adjacent to each other in a stacking direction; a defect detection unit (73) configured to detect a defect remaining in a manufactured object based on a size of the plurality of defect candidates positioned at the substantially same positions and specified in the plurality of layers in the stacking direction and a size of each of the plurality of defect candidates in the layer, and to determine the defect as any one of a first defect which is not allowed to remain in the manufactured object and a second defect which is allowed to remain in the manufactured object based on a maximum length of the defect; and a display control unit (74) configured to create a visualized image obtained by visualizing defect information including at least one of the first defect and the second defect and to perform control such that the visualized image is displayable on a display unit (90) during powder bed fusion additive manufacturing.

An information processing apparatus (54) includes: a defect candidate specifying unit (72) that specifies a plurality of defect candidates that are located at substantially same positions in a plurality of layers that are adjacent in a stacking direction; a defect detection unit (73) that detects defects remaining in shaped objects on the basis of sizes of the plurality of defect candidates, which are located at substantially the same positions and are specified in the plurality of layers, in the stacking direction and sizes inside the layers; and a shaping control unit (71) that performs control to stop at least PBF-AM of shaped objects, from which the defects have been detected, or output a warning in a case where the sizes of the defects exceed a preset threshold value in the middle of the PBF-AM.

An information processing apparatus includes: a defect candidate specifying unit (72) that detects a defective portion generated in a layer as a defect candidate for each layer on the basis of layer data taken for a corresponding layer on which a manufactured object is manufactured by powder bed fusion additive manufacturing (PBF-AM) and specifies a plurality of defect candidates at positions substantially identical to each other in a plurality of layers adjacent in a layering direction; and a defect detection unit (73) that detects, on the basis of a size in the layering direction and a size in the layer of the plurality of defect candidates specified in the plurality of layers at positions substantially identical to each other, a defect remaining in the manufactured object.

An information processing apparatus includes a defect detection area setting unit (72) configured to set, on the basis of information input from an input unit (60), an area inside a predetermined amount from a surface of a formed object manufactured by a three-dimensional powder bed fusion additive manufacturing (PBF-AM) apparatus (1) as a defect detection area, and a defect detection unit (74) configured to detect a defect present in the formed object on the basis of layer data obtained for each layer in which the formed object is powder-bed-fusion additively manufactured, to identify a defect detected in the defect detection area as a defect leading to a quality defect, and to output defect information on the identified defect.

A sample processing apparatus (100) that irradiates a sample (S) disposed in a sample chamber (12) with a processing beam to process the sample (S), the sample processing apparatus (100) includes: a processing beam source (30) that irradiates the sample (S) with the processing beam; a sample holder (50) that holds the sample (S); a sample stage (40) on which the sample holder (50) is mounted; and a shield (60) disposed in the sample chamber (12), wherein the sample holder (50) and the shield (60) form a container (2) that accommodates the sample (S), and the container (2) is provided with a window portion (64) that guides the processing beam into the container (2).

There is provided a sample holder capable of restricting the positional deviation of a sample. The sample holder (100) is for use with sample milling equipment that mills the sample (2) by irradiating it with an ion beam (IB). The sample holder (100) includes a holder base (10), a sample holding portion (20) for holding the sample (2), and a positional securing portion (40) for securing the sample holding portion (20) in position. The positional securing portion (40) includes a shaft (42) connected to the sample holding portion (20), a first supportive member (44) providing rotatable support of the shaft (42), and a second supportive member (46) supporting the first supportive member (44) such that it can move along an axis perpendicular to the axis of the shaft (42). When the second supportive member (46) is rotated, the second supportive member (46) moves along the axis of the shaft (42), thus tightening together the sample holding portion (20) and the holder base (10) while rotation of the first supportive member (44) concomitant with the rotation of the second supportive member (46) is restricted.

A calculator (41) calculates gradient information based on a detection value set acquired from each micro-surface of a sample. A gradient map is formed from a plurality of sets of gradient information corresponding to a plurality of micro-surfaces. Each set of gradient information includes information which identifies an azimuth angle of each micro-surface. A corrector (42) corrects each set of gradient information so that the azimuth angle of each micro-surface is corrected according to a current sample observation condition. The azimuth angle and an inclination angle may be corrected sequentially or simultaneously.

A three-dimensional PBF-AM apparatus (1) reflecting one aspect of the present invention includes a stage (6), a beam emitter (2), a beam deflector (10), and a control apparatus (30). The beam deflector (10) deflects a beam emitted from the beam emitter (2). The control apparatus (30) controls the beam deflector (10). The control apparatus (30) determines a next irradiation position, which is a position to be irradiated with the beam, next based on a rank assigned to each of unirradiated positions that have not yet been irradiated with the beam. Further, the control apparatus (30) controls the beam deflector (10) to irradiate the next irradiation position with the beam. The rank is determined based on a molten state around each of the unirradiated positions and is updated every time the beam is emitted.

A first trend chart (170) and a second trend chart (172) are displayed along with a chromatogram (168). The first trend chart (170) is generated based on a plurality of first representative value arrays obtained from a plurality of mass spectra. The second trend chart (172) is generated based on a plurality of second representative value arrays obtained from the plurality of mass spectra. A mass spectrum stable period is determined based on the first trend chart (170) and the second trend chart (172).

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A secondary battery (32) is fixed in a sealed container (28). A first tool unit (56) and a second tool unit (58) are provided on the sealed container (28). The first tool unit (56) is formed from a first tool (60) and a first holder (62). The second tool unit (58) is formed from a second tool (74) and a second holder (76). The first holder (62) holds the first tool (60) while maintaining airtightness of the sealed container, while allowing an advancing/retreating movement and a tilting movement of the first tool (60). The second holder (76) has a structure similar to that of the first holder (62).

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A charged particle beam system includes: a chamber (202); a charged particle source unit that has a charged particle source (210); a supporting member (700) that is provided on a side wall of the chamber and detachably supports the charged particle source unit inside the chamber; and a chamber door (204) that is provided on the side wall of the chamber for access to an interior of the chamber.

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A charged particle beam system includes: a sample chamber (202); a pre-evacuation chamber (232) that is connected to the sample chamber (202); a first evacuation pump (510) that has a first port (512) connected to the sample chamber (202), and a second port (514) connected to the pre-evacuation chamber (232); a second evacuation pump (520) that is connected to the pre-evacuation chamber (232), an evacuation port (516), and the sample chamber (202); and a controller (400) that controls the first evacuation pump (510) and the second evacuation pump (520), the controller (400) performing, when a sample (S) is introduced into the pre-evacuation chamber (232): a process of causing the second evacuation pump (520) to evacuate the pre-evacuation chamber (232); a process of making a determination of whether a vacuum degree inside the pre-evacuation chamber (232) has reached a first vacuum degree, based on power of the second evacuation pump (520); and a process of causing the first evacuation pump (510) to evacuate the pre-evacuation chamber (232) when the vacuum degree inside the pre-evacuation chamber (232) is determined to have reached the first vacuum degree.