Ebara

An exhaust system for exhausting hydrogen discharged from an EUV exposure apparatus is provided that includes a light-source-unit hydrogen pump module having a vacuum pump unit for sucking hydrogen discharged from a light source unit of the EUV exposure apparatus, a first oxygen sensor module that measures an oxygen concentration of gas discharged from the light-source-unit hydrogen pump module, an exposure-unit hydrogen pump module having a vacuum pump unit for sucking hydrogen discharged from an exposure unit of the EUV exposure apparatus, a second oxygen sensor module that measures an oxygen concentration of gas discharged from the exposure-unit hydrogen pump module, a hydrogen treatment module for treating hydrogen gas discharged from the first and second oxygen sensor modules, a utility module for supplying cooling water and/or nitrogen gas to each module, and a control module for supplying power to each module, and controlling each module.

A polishing method capable of improving flatness of a bonding surface for forming a laminated substrate is disclosed. The polishing method includes: measuring a shape of a periphery of a substrate having the bonding surface for forming the laminated substrate, the bonding surface including a surface of a device region and a surface of a dielectric film formed on the periphery and raised from the device region; determining a polishing recipe including a change in a movement speed of a polishing head from a polishing start position to a polishing end position based on the measured shape of the periphery; and polishing the dielectric film to planarize the bonding surface by pressing, by the polishing head, a polishing tool against the periphery of the substrate being rotated while the polishing head is moved in a radial direction of the substrate according to the determined polishing recipe.

A pump casing capable of preventing clogging of a pump caused by foreign matter is disclosed. The pump includes: an impeller; and a pump casing that houses the impeller therein. The pump casing has a cutter that faces a leading edge of the impeller. The cutter has a front-side surface that forms a front side of the cutter in a rotation direction of the impeller. An angle formed between the front-side surface of the cutter and the leading edge of the impeller as viewed from a direction of a rotation axis of the impeller gradually decreases with rotation of the impeller. A maximum value of the angle is less than 90 degrees.

A package (1) includes a packaging box (2) that is formed of corrugated cardboard and that includes a side wall portion surrounding four sides of a packaging target (100) and an in-box fixation member (20) of which both ends are fixed to facing surfaces of the side wall (10) portion and the in-box fixation member includes a first angle material (21), in which a plurality of sheets of corrugated cardboard is stacked and bent into an L-like shape, and a pair of second angle materials (22), in each of which one or a plurality of paper members is stacked and bent into an L-like shape, and through which both ends of the first angle material are fixed to the facing surfaces of the side wall portion.

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Zusammenfassung wird geladen …

Zusammenfassung wird geladen …

Zusammenfassung wird geladen …

Zusammenfassung wird geladen …