SCREEN Holdings Patente

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A coating nozzle discharging a coating solution is moved to an upper side of a notch as a notched part of the substrate held in a stationary state. The substrate is rotated only once in a horizontal plane while the coating solution is discharged from the coating nozzle to form a coating film on an upper surface of a peripheral edge part of the substrate. The coating nozzle retracts when the coating nozzle is located on the upper side of the notch again. Application of the coating solution is started from the notch of the substrate, and is finished at the notch, thus the coating solution is applied only once to the peripheral edge part of the substrate, and the coating film with a narrow width can be formed. Overlapping of the coating solution does not occur in the notch, thus the coating film with a uniform width can be formed.

Provided is a technique of determining a printing method in consideration of quality of printing. A screen is regulated by page data, a range of a page in the screen is regulated by a page region, and the page data includes a content component arranged in the page region and regulating the content. A printing method determination method obtains a ratio of an area of the content component to the page region, and determines the printing method based on the ratio.

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A substrate processing method includes a liquid film forming step of supplying a sublimable substance-containing liquid containing a sublimable substance to a front surface of a substrate W to form a liquid film of the sublimable substance-containing liquid on the front surface of the substrate W, a solidified film forming step of changing the liquid film of the sublimable substance-containing liquid into a solidified film SF containing the sublimable substance on the front surface of the substrate W, a sublimating step of sublimating the solidified film SF to remove the solidified film SF from the front surface of the substrate W, and a humidity increasing step of increasing humidity of an atmosphere in contact with the substrate W after sublimation of the solidified film SF is started.

Provided is a technology that can effectively reduce a pattern collapse ratio of a substrate. A method of processing a substrate includes a holding step, a liquid supplying step, a first drying liquid supplying step, a second drying liquid supplying step, and a drying step. In the first drying liquid supplying step, a first drying liquid having a first boiling point (bp1) and a surface tension lower than that of the processing liquid is supplied to a first main surface of the substrate. In the second drying liquid supplying step, a second drying liquid having a second boiling point (bp2) and a surface tension lower than that of the first drying liquid is supplied to the first main surface of the substrate. In the drying step, the substrate is dried. A second main surface of the substrate is heated to a first temperature in at least a part of a time in the first drying liquid supplying step, and at least a part of the second main surface of the substrate is heated to a second temperature, in at least a part of a time in the second drying liquid supplying step. A positive or negative sign of a value obtained by subtracting the second temperature from the first temperature is identical to a positive or negative sign of a value obtained by subtracting the second boiling point (bp2) from the first boiling point (bp1).

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A technique is provided with which it is possible to effectively consume a plurality of continuous base materials with different remaining amounts. A job list and a continuous paper list are prepared. The job list registers job attribute information that includes print length information that indicates the length of continuous paper necessary for printing of each print job. The continuous paper list registers continuous-base-material attribute information that includes paper remaining information that indicates a remaining length of each roll of continuous paper. Then, a job batch is generated in accordance with the continuous-paper attribute information and the job attribute information. The job batch defines one roll of continuous paper and a print job, the continuous paper being selected from among the continuous paper list, the print job being extracted from among the job list and printable on the selected continuous paper.

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In order to efficiently recognize a posture of a component, reference shape information on a two-dimensional shape of a three-dimensional model in a virtual image that can be acquired by imaging the three-dimensional model of a component to be searched is acquired for each of a plurality of first virtual camera positions located along a plurality of virtual spherical surfaces surrounding the three-dimensional model of the component to be searched and corresponding to one or more initial setting ranges for the component to be searched defined by setting range information, based on three-dimensional design information regarding the component to be searched among one or more target components and the setting range information defining the one or more initial setting ranges related to a virtual camera position with respect to a target component set in advance. For each first virtual camera position, a numerical value indicating a matching degree between real shape information on the two-dimensional shape of an object in a real image obtained by capturing the component to be searched and the reference shape information is calculated. Among the plurality of first virtual camera positions, a virtual camera position having the highest matching degree between the real shape information and the reference shape information is detected.

A substrate processing apparatus (1) includes a substrate holder for holding a disk-like substrate (9), an electrode unit (5) facing a target portion during etching, which is part of a peripheral portion (93) of the substrate (9), and having a first electrode (51) and a second electrode (52), a processing liquid filling part (6) for forming a liquid-filled state in which a processing liquid fills a space among the target portion, the first electrode (51), and the second electrode (52) by discharging the processing liquid from a discharge port (611), a rotator for rotating the substrate (9) relative to the electrode unit (5), to thereby move the target portion in the peripheral portion (93) in a circumferential direction of the substrate (9), and a power supply (50) for applying a voltage to between the first electrode (51) and the second electrode (52). It is thereby possible to appropriately remove a metal film (96) in the peripheral portion (93) of the substrate (9).

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Regarding an inkjet printing apparatus, the apparatus makes it possible to suppress the occurrence of defects in a print image more effectively than before in a case where an ejection defect nozzle is present.Assuming that K is an integer of 2 or more, a region corresponding to a width of each ink ejection head is divided into K comparison regions associated with K different provisional compensation coefficients (S100), and a plurality of tentative defective nozzles is set for each comparison region (S110). K pieces of sample image data are extracted from the captured image of the compensation coefficient calculation chart obtained by performing an ink amount compensation process while applying the K provisional compensation coefficients to the K comparison regions, respectively (S180), and data affected by the ejection defect nozzle is deleted from the K pieces of sample image data (S190). A provisional compensation coefficient to be adopted as a compensation coefficient is determined based on the K pieces of comparison data obtained thereby (S200).

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