STMicroelectronics Italy

A waveform generator includes: a system control unit (2) and a plurality of channels, (3.1, ..., 3.N) controlled by the system control unit (2) and configured to supply driving signals (V1, ..., VM) for driving an array of transducers (5.1, ..., 5.N). Each channel includes: a sequential access memory (10) having a plurality of rows, each containing instruction words (W) for generating a respective step of a respective one of a plurality of waveforms, and a memory output (10a) defined by an output row at a fixed location. The sequential access memory (10) contains blocks of instruction words (W), each defining a respective waveform. Each channel also includes an internal control unit (12), configured to sequentially move the content of the sequential access memory (10), based on the instruction word (W) currently at the memory output (10a), so that sequences of instruction words (W) are provided at the output row (10a). A starting instruction word (W) of each block of instruction words (W) defining the waveform contains an identification tag (WT) identifying the waveform. The internal control unit (12) receives a reference tag (TR) from the system control unit (2) and sequentially shifts the sequential access memory (10) until one of the starting instruction words (W) that contains an identification tag (WT) matching the received reference tag (TR) is moved to the memory output (10a).

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Method for manufacturing a micro-electro-mechanical device (30; 30'), comprising the steps of: forming, on a substrate (2), a first protection layer (5) of crystallized aluminum oxide, impermeable to HF; forming, on the first protection layer (5), a sacrificial layer (8, 8') of silicon oxide removable with HF; forming, on the sacrificial layer (8, 8'), a second protection layer (15) of crystallized aluminum oxide; exposing a sacrificial portion (8') of the sacrificial layer (8, 8'); forming, on the sacrificial portion (8'), a first membrane layer (20) of a porous material, permeable to HF; forming a cavity (22) by removing the sacrificial portion (8') through the first membrane layer (20); and sealing pores of the first membrane layer (20) by forming a second membrane layer (24) on the first membrane layer (20).

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A microelectromechanical gyroscope (10) with detection along a vertical axis is provided with a detection structure (10) having a movable structure (12), suspended above a substrate (13) so as to perform, as a function of an angular velocity (Ω<z>) around the vertical axis a sense movement along a first horizontal axis (x). The movable structure has at least one drive mass (14) internally defining a window (16), elastically coupled to a rotor anchor (20'), at an anchoring region (A), through elastic anchoring elements (21); at least one bridge element (18), rigid and of a conductive material, cantilevered suspended and extending within the window along the first horizontal axis, elastically coupled to the drive mass; movable electrodes (23), carried integrally by the bridge element with extension along a second horizontal axis (y). The detection structure (10) also has stator electrodes (28, 29), arranged in the window and interdigitated with the movable electrodes, at a certain separation distance below the bridge element (18), which extends longitudinally above the same stator electrodes and the movable electrodes.