SCREEN Holdings Patente

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A substrate processing apparatus (1) includes a substrate holder that holds a substrate (9) having a peripheral edge portion (93) on which a metal film (96) is provided on the side of a first main surface (91), an electrode unit (5) that includes a first electrode (51) and a second electrode (52) and in which, when etching is performed, the first electrode is located in the vicinity of the peripheral edge portion on the side of the first main surface, and the second electrode is separated from the first electrode and located in the vicinity of the substrate, a processing-liquid filling unit (6) that fills gaps between the substrate and each of the first and second electrodes with a processing liquid (L1), a power source (50) that applies a voltage between the electrodes to allow etching of a portion of the metal film that is located in the vicinity of the first electrode, and a rotation mechanism that rotates the substrate relative to the electrode unit. The first electrode has a side face including an interest region (516) that has repellency to the processing liquid, the interest region facing radially inward and located in the vicinity of the first main surface.

A substrate processing apparatus (1) includes a substrate holder that holds a substrate (9) having a first main surface (91) and a second main surface (92) and having a peripheral edge portion (93) on which a metal film (96) is provided on the first main surface side, an electrode unit (5) that includes a first electrode (51) and a second electrode (52) and in which, when etching is performed, the first electrode is located in the vicinity of the peripheral edge portion on the first main surface side, and the second electrode is separated from the first electrode and located in the vicinity of the substrate, a processing-liquid filling unit (6) that fills gaps between the substrate and each of the first and second electrodes with a processing liquid (L1), a power source (50) that applies a voltage between the first electrode and the second electrode to allow etching, a rotation mechanism that rotates the substrate relative to the electrode unit, and an auxiliary fluid nozzle (81) that, when etching is performed, jets out an auxiliary fluid radially outward to the peripheral edge portion on the second main surface side of the substrate.

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An ink supplier includes: a supply reservoir storing ink to be supplied to a plurality of heads; and a discharge pipe 71 used for discharging the ink from the supply reservoir. The supply reservoir includes: a cylindrical first horizontal reservoir 51 having a plurality of supply ports each communicating with one of the plurality of heads; and a first vertical reservoir 52 having a side surface provided with a first opening communicating with one end of the first horizontal reservoir 51. The first horizontal reservoir 51 has a bottom surface that is tilted from a horizontal direction at an angle of tilt equal to or greater than 0.3° in such a manner as to extend downward from the one end toward the other end. The first horizontal reservoir includes a first discharge port 81 provided at a bottom portion of the first horizontal reservoir at the other end and communicably connected to the discharge pipe 71. Thus, a precipitate in the first horizontal reservoir 51 moves along the tilted bottom surface and gathers at a lowermost point at the other end where the first discharge port 81 is provided. This allows the precipitate in the first horizontal reservoir 51 to be discharged efficiently. Specifically, a technique allowing a precipitate in a tank to be efficiently prevented from entering a head is provided.

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Multi-screening in a printing apparatus is realized with a simple circuit.Provided are a threshold matrix set (710) including at least one threshold matrix (71) including a plurality of thresholds for comparison with gradation values of a plurality of pixels included in raster data (64) for printing, a threshold set including at least one threshold (72) for comparison with a gradation value of each pixel included in the raster data (64), and a halftone processing unit (52) configured to generate halftone image data (65) based on a result of comparing the gradation value of each pixel included in the raster data (64) with the threshold. The halftone processing unit (52) switches, for every pixel, a reference destination of the threshold compared with the gradation value in the raster data (64) between the threshold matrix set (710) and the threshold set (720) in accordance with a magnitude of the gradation value in the raster data (64).

A printing system including a first printer and a second printer is provided with: a job group creation unit (303) that creates a job group defining a plurality of jobs to be grouped and a print order thereof; a job group storage unit (111) that stores information on the print order of the plurality of jobs; a job group updating unit (112) that updates the information on the print order stored in the job group storage unit (111) based on information on an output order when printing is executed by the second printer; and a print instruction unit (113) that instructs the first printer to execute printing based on the plurality of jobs in the print order stored in the job group storage unit (111) .

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A printer includes a controller (50) including a dummy-print-image creator (56) and a print controller (57). The dummy-print-image creator (56) creates a dummy print image (D2) based on an actual print image (D1), the actual print image being an image to be printed in an actual print area on a printing medium, the dummy print image being an image to be printed in an area located laterally to the actual print area in a width direction. A print controller (57) controls a transport mechanism (10) and inkjet heads (311, 321) to print the actual print image (D1) and the dummy print image (D2). The dummy-print-image creator (56) creates the dummy print image (D2) with a printing ratio corresponding to the printing ratio of the actual print image (D1). This allows the controller of the printer to automatically create the dummy print image (D2) for suppressing winding misalignment of the printing medium and reduces the amount of ink to be used for printing of the dummy print image (D2).

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A technique disclosed in the specification of the present application is a technique of suppressing damage on an electrolysis cell in substrate processing. A substrate processing apparatus according to a technique disclosed in the specification of the present application includes a substrate processing part, a supply tank, a generation part, a collection part, a first supply route supplying a processing solution generated in the generation part to the supply tank, and a second supply route supplying the processing solution generated in the generation part to the collection part, and the collection part supplies a treated solution with which the processing solution supplied through the second supply route has been mixed to the generation part.

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