Murata Manufacturing

An electrical device comprising,- a substrate region (100),- a first electrode formed in a first doped diamond layer (101), on the substrate region (100),- a dielectric layer (102, 105, 106, 108, 110, 104, 107) on the first doped diamond layer (101) comprising two adjacent regions, a first region called intermediate layer (102, 105, 106, 108, 110) formed in a dielectric diamond material layer and a second region (104, 107) formed in a dielectric material,- a second electrode formed in a conductor material layer (103, 113, 123, 133), located on the dielectric layer,wherein- said first region in the dielectric diamond material having a first constant thickness- the second region comprises a dielectric material and has an increasing thickness from said first constant thickness on the intermediate layer (102, 105, 106, 108, 110) side to a second thickness on its other side opposite to the intermediate layer, said increase of thickness having a curved shape,- the second electrode (103, 113, 123, 133) comprises a first region (103a) having a first constant thickness above the intermediate layer (102, 105, 106, 108, 110) and a termination region (103b, 113b) extending the first region in a curved shape above the dielectric material.

The invention concerns a wafer comprising: - a metal layer deposited on a substrate, said metal layer comprising at least: • a first region made of said metal; and • a porous region comprising a plurality of substantially straight pores that extend from a top surface of the first porous region towards the substrate, the porous region being thicker than the first region; - at least one integrated device formed inside the pores of the porous region; the wafer further comprising: - a test arrangement comprising: • an insulating layer deposited on both the first region and the porous region, • a first contact pad and a second contact pad deposited on the insulating layer above the porous region; and a third contact pad deposited on the insulating layer above the first region.

An integrated electrical device comprising an energy storage component, comprising:a support comprising a porous region (103) including a plurality of substantially straight pores (POR) that extend from a top surface of the porous region towards the bottom of the porous region,an insulating layer (104) having an opening (OP) delimiting a portion of the porous region,a bottom electrode layer (105),an intermediate region (106, 1061, 106T, 106T) comprising a dielectric or an ionic conductor, the intermediate region having an inner portion (1061) arranged on an inner portion of the bottom electrode layer and a top portion (106T, 106T') arranged on a top portion of the bottom electrode layer, the inner portion of the intermediate region having a first thickness (T1) and the top portion of the intermediate region having a second thickness (T2) greater than the first thickness,a top electrode layer (107) arranged on the intermediate region.

The present invention relates to an electrical device (100) comprising a capacitor for high-voltage applications and method for manufacturing thereof. In particular, the proposed electrical device (100) includes a capacitor comprising:- a bottom electrode (110) comprising a semiconductor substrate (111),- a dielectric (120) extending conformally on the bottom electrode (110),- a top electrode (130) on the dielectric (120),wherein the substrate (111) comprises:- a first region of a first doping type (113) extending from a bottom surface of the substrate (111-BS) up to a top surface of the substrate (111-TS),- second regions of a second doping type (114) having opposite charge carriers in comparison with the first doping type and extending from the top surface of the substrate (111-TS) down to a given depth (111-D).

The disclosure describes an arrangement comprising a spring-supported tiltable hermetic housing structure with an optical window and single-axis scanning mirror inside the housing structure. The arrangement enables the use of the resonance scanning mode of the mirror in vacuum, inside the housing structure, as well as the quasistatic scanning mode of the mirror by oscillating the housing structure in ambient pressure.

A substrate assembly includes a first substrate, a second substrate, a retainer attached to the second substrate, and a housing connected to the first substrate. The retainer is mounted to the housing, and the first substrate and the second substrate are electrically connected. The retainer includes an adjustable arm that is configured to vary in length, and a clamp that engages the second substrate.

The disclosure relates to a MEMS device with in-plane moving structures and translation beams to move a rotating structure out-of-plane, wherein the arrangement of the translation beams contributes to the out-of-plane rotation of the rotating structure. An advantage of the arrangement of the disclosure is that out-of-plane movement to the large tilt angles is achieved with lower voltage in comparison to two-layer tilting structures.

An accelerometer which comprises a first, second, third and fourth measurement cell. Each of the first, second, third and fourth measurement cells comprises a mass element which is mobile in the y-direction and first and second fixed structures. The mass element forms a differential capacitor with the first and second fixed structures. Each of the first, second, third and fourth measurement cells comprises a central line, and the first and second fixed structures are on opposite sides of the central line in each of the first, second, third and fourth measurement cells. The placement of the first and second capacitors with respect to the central line in the first and third measurement cells is the same. The placement of the first and second capacitors with respect to the central line in the second and fourth measurement cells is the same. The placement of the first and second capacitors with respect to the central line in the first measurement cell is opposite to the placement of the first and second capacitors with respect to the central line in the second measurement cell.

A Lissajous frequency-modulated microelectromechanical gyroscope where a control unit is configured transmit drive signals to one or more drive transducers to drive one or more mass elements in a first and a second oscillation mode. The control unit is configured to continuously transmit a first crosstalk compensation signal to the one or more mass elements and to set the amplitude of the first crosstalk compensation signal to a value which is proportional to an amplitude difference in a frequency spectrum obtained from a sense signal retrieved from the one or more mass elements.

The present invention relates to an electrical device and a method for manufacturing thereof. The proposed device (100) comprises a capacitor including a porous structure (300), the porous structure (300) comprising: - a first electrode region (310) comprising first pores (311), wherein these first pores (311) comprise first conductive wires (312), - a second electrode region (320) comprising second pores (321), wherein these second pores (321) comprise second conductive wires (322), and - a dielectric region (330) comprising third pores (331) and interposed between the first and second electrode regions (310, 320), wherein the capacitor is formed by the first pores (311) of the first electrode region (310) and the second pores (321) of the second electrode region (320) facing each other and being separated by the third pores (331) of the dielectric region (330).