Infineon Technologies Patente

A photoacoustic gas sensor (100) comprises an emitter (110) configured to emit light, a sensor (120) configured to measure pressure variations and a measurement cell (130) enclosing the emitter and the sensor. At least a first ventilation opening (140a) and a second ventilation opening (140b) connect the measurement cell (130) with an environment (150).

A semiconductor device (100) is proposed. The semiconductor device includes a semiconductor substrate (102) including at least a first semiconductor substrate portion (1021) and a second semiconductor substrate portion (1022) separated from one another by a first part (1041) of an intermediate dielectric structure (104) along a first lateral direction (x1). The semiconductor device (100) further includes a patterned first metal layer (106) over a first surface (1081) of the semiconductor substrate (102), wherein a first part (1061) of the patterned first metal layer (106) electrically connects the first and second semiconductor substrate portions (1021, 1022) at the first surface (1081). Each of the first and second semiconductor substrate portions (1021, 1022) includes a main portion (1023) adjoining the first surface (1081) and an auxiliary portion (1024) adjoining a second surface (1082) opposite to the first surface (1081), and, with respect to each of the first and second semiconductor substrate portions (1021, 1022), a width (w12, w22) of the auxiliary portion (1024) along the first lateral direction (x1) is larger than a width (w11, w21) of the main portion (1023) along the first lateral direction (x1).

In accordance with an embodiment, a microelectromechanical system (MEMS) switch device includes: a substrate; a switching membrane disposed above the substrate; a pull-in electrode disposed above the switching membrane; a metal contact disposed on the switching membrane; and a pull-back electrode disposed below the switching membrane, wherein the switching membrane is movable between an open position and a closed position, and wherein in the closed position, the metal contact electrically connects two RF signal lines.

A radio frequency switch (100) is provided. The switch includes a first radio frequency terminal (106), a second radio frequency terminal (108), and a phase change material (114) electrically coupled between the first radio frequency terminal (106) and the second radio frequency terminal (108). The phase change material comprises an alloy of at least three different chemical elements, wherein the alloy contains at least one of In, Ag and Sn.

A method for producing a MEMS chip (100) with an environmental barrier structure (150) made from polymer nanofibers (151), the method comprising providing a wafer substrate (110) having plurality of adjacent through holes (131, ..., 134). The environmental barrier structure (150) is created by applying polymer nanofibers (151) onto one of the front and back sides (111, 112) of the wafer substrate (110). A plurality of MEMS chips (100) are singulated from the wafer substrate (110) by applying a two-step laser process comprising: a first laser-processing step including guiding a laser beam (160) over the one side of the wafer substrate (110) at which the polymer nanofibers (151) are applied in order to locally remove the polymer nanofibers (151) from the wafer substrate (110) and to locally uncover an underlying surface, and a subsequent second laser-processing step including applying a stealth dicing process for singulating the MEMS chips (100) by guiding a stealth dicing laser beam over the locally uncovered surfaces.

Provided is an apparatus for detecting micro motion in a scene sensed by a radar sensor having one or more receive channel. The apparatus includes processing circuitry configured to receive radar data outputted by the radar sensor for each receive channel, the radar data being arranged as frames for each receive channel. The processing circuitry is further configured to for each receive channel, for each frame and for each range bin of a plurality of range bins of the radar data, each range bin corresponding to a distance window relative to the radar sensor, extract micro motion information from the radar data of the considered range bin and generate a first value from said micro motion information. The processing circuitry is further configured to for each receive channel, for each frame, for each range bin, determine a second value based on the first value determined for the considered range bin at the considered frame and a prior first value determined for the considered range bin at a prior frame. The processing circuitry is further configured to for each range bin, determine a third value for the considered range bin based on the respective second values. The processing circuitry is further configured to determine occurrence of the micro motion in the scene based on the third values.

Provided is an apparatus for controlling one or more function of a toilet. The apparatus includes processing circuitry configured to receive radar data of a radar sensor integrated into the toilet and determine movement parameters of a user relative to the radar sensor based on the radar data. Furthermore, the processing circuitry is configured to determine, based on at least part of the movement parameters of the user, whether the user is within a predefined area. In response to determining that the user is within the predefined area, the processing circuitry is configured to determine a movement trajectory of the user based on the movement parameters of the user. In addition, the processing circuitry is configured to determine, based on the movement trajectory, whether the user is slowing down while approaching the toilet. In response to determining that the user is slowing down while approaching the toilet, the processing circuitry is configured to trigger the one or more function of the toilet.

The present disclosure concerns a MEMS pressure transducer Wafer-Level Chip-Scale Package (100) and a method for manufacturing the same. The method comprises a step of providing a MEMS wafer (110) comprising a plurality of adjacently arranged MEMS membrane structures (120). The method comprises a further step of providing an ASIC wafer (210) comprising a plurality of adjacently arranged integrated electronic components (220), and bonding the MEMS wafer (110) with the ASIC wafer (210) with their respective front sides (111, 211) facing each other. The method comprises a further step of structuring at least one first cavity (150) into MEMS wafer (110) and structuring a smaller second cavity (160) into the first cavity (150).

The present disclosure relates to a sensor arrangement for detecting a substance (112) on a windshield (104). The sensor arrangement comprises a mm-wave signal generator (102) configured to provide a first mm-wave signal. The sensor arrangement further comprises a receiver (106) and a processing circuit (108). The receiver (106) is configured to receive a second mm-wave signal. The processing circuit (108) is configured to determine information indicating the substance (112) on the windshield (104) based on the first mm-wave signal and the second mm-wave signal.

A method for operating a radar sensor in a vehicle, the radar sensor comprising a radar transceiver operating in an operating frequency range. The method comprises generating within the radar sensor an information related to an orientation of the radar sensor and determining an orientation of a transmission of the radar transceiver based on the information related to the orientation of the radar sensor. Further, the method comprises selecting a frequency sub-band of the operating frequency range of the radar transceiver depending on the orientation of the radar transceiver for transmitting radar signals

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A neural network device and a method using a neural network for sensor fusion are disclosed, wherein the neural network device includes a neural network (136) and wherein the neural network (136) is configured to: process a first grid (132) including a plurality of grid cells, wherein the first grid (132) represents at least a first portion of a field of view (108) of a first sensor (104), wherein at least one grid cell has information about an occupancy of the first portion of the field of view (108) assigned to the at least one grid cell, the information being based on data provided by the first sensor (104); process a second grid (134) including a plurality of grid cells, wherein the second grid (134) represents at least a second portion of a field of view (110) of a second sensor (106), wherein at least one grid cell has information about an occupancy of the second portion of the field of view (110) assigned to the at least one grid cell, the information being based on data provided by the second sensor (106); and fuse the processed first grid (132) with the processed second grid (134) into a fused grid (138), wherein the fused grid (138) includes information about the occupancy of the first portion of the field of view (108) of the first sensor (104) and the occupancy of the second portion of the field of view (110) of the second sensor (106).

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