JEOL Patente

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A charged particle beam device includes: a detection chamber flange 140; a detector 30; a detector holding stand 110 which holds the detector; a first shaft 120 which is slidably inserted into a guide hole 144 and connected to the detector holding stand, the guide hole being provided in the detection chamber flange. The device may further include a first flange 170 which is attached to the detection chamber flange and has a spherical bearing; a second flange180 which is supported by the spherical bearing of the first flange; and a second shaft 122 which is slidably inserted into a guide hole 182 provided in the second flange and passes through a through-hole 146 in the detection chamber flange to be connected to the detector holding stand, each of the first shaft and the second shaft being provided with a flow channel 121,122 of a heat transfer medium for cooling or heating the detector.

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A lower-side structure (12) forms a specimen chamber (18) in which a specimen base is provided. An upper-side structure (14) forms a nozzle chamber (20) above the specimen chamber (18). The specimen chamber (18) and the nozzle chamber (20) are separated by a gate valve (16). In the nozzle chamber (20), at least a tip opening (36) of a nozzle (34) that ejects a specimen is present. A control device (74) maintains a relationship of gas pressures such that a gas pressure in the specimen chamber (18) is higher than a gas pressure in the nozzle chamber (20) when the lower-side structure (12) and the upper-side structure (14) are in communication with each other.

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An image conversion unit (28) includes a selector (30) and a plurality of image converters (32-1, ... 32-n). Each image converter is formed from an estimator of machine learning type, and estimates, based on an image acquired under a first observation condition and as a reference image, an image which is presumed to be acquired under a second observation condition. When a particular reference image is selected from among a plurality of reference images displayed on a display (36), a second observation condition corresponding to the selected reference image is set in an observation mechanism (10) as a next observation condition.

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An X-ray analyzer (100) includes: an X-ray detector (16b) that detects an X-ray emitted from a specimen (S) and outputs a signal a step of which has a height corresponding to energy of the X-ray; a pulse generation circuit (34) that converts the signal output from the X-ray detector (16b) into a first pulse signal; a pulse-width setting circuit (36) that sets a pulse width; a pulse-width conversion circuit (38) that converts a pulse width of the first pulse signal into the pulse width set by the pulse-width setting circuit (36) to form a second pulse signal; a pulse-height discriminator (40) that discriminates the second pulse signal according to a pulse height of the second pulse signal; a counting circuit (50) that calculates a counting rate of the discriminated second pulse signal; and a counting-loss correction processing unit (62) that corrects the counting rate calculated by the counting circuit (50), and the counting-loss correction processing unit (62) corrects the counting rate based on the pulse width set by the pulse-width setting circuit (36).

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A drift amount computing device capable of precisely computing an amount of drift is offered. The drift amount computing device (100) is used to compute an amount of drift between a first image and a second image, and comprises a correlation function computing section (112) for calculating a correlation function between the first and second images, a local maximum position searching section (114) for searching a range of positions of the correlation function for local maximum positions at which the correlation function assumes its local maxima, a local maximum position determining section (116) for assigning weights to intensities of plural local maximum positions searched for by the local maximum position searching section (114) according to the distance from the center of the correlation function, comparing the weighted intensities of the local maximum positions, and determining one of the maximum local positions which corresponds to the amount of drift, and a drift amount computing section (118) for computing the amount of drift, based on the local maximum position corresponding to the amount of drift.

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To cover a wide wavelength bandwidth, a spectroscopic apparatus uses three varied line spacing concave diffraction gratings G<1>to G<3>, the corresponding energy ranges for G<1>, G<2>, and G<3>being 50 to 200, 155 to 350, and 300 to 2200 eV, respectively. In the respective wavelength ranges, the diffraction conditions are satisfied. To provide a high throughput and a high resolution in the respective wavelength regions, the incident angles α<1>to α<3>for G<1>to G<3>measured from the normal line of the diffraction grating are specified to be α<1>< α<2>< α<3>. Presupposing the normal lines of all diffraction gratings are superposed upon a common normal line, in order to meet α<1>< α<2>< α<3>, the center positions Δ<1>to Δ<3>for G<1>to G<3>are set on the normal line (as Δ<1>< Δ<2>< Δ<3>). From G<1>to G<3>, one diffraction grating can be selected.

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